A high-power electrostatic actuator comprising rotor and stator layers with fault-tolerant electrode structures, a housing to contain the electrodes and dielectric fluid, and electronic circuitry driving a plurality of high-voltage phases. The actuator is constructed from multiple rotor and stator films separated by spacing elements. The electrode structure provides self-alignment for precise assembly. The actuator assembly includes built-in fine-position sensors to allow optimal timing in powering phases, and a coarse position sensor for feedback control. The electrode structure has a large region of linear force to provide low torque-ripple allowing simple high/low voltage pulsing instead of analog high voltage waveforms. Single or double sided flexible circuit manufacturing techniques are used to fabricate the rotor and stator films at low cost.

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